Borophosphosilicate glass

Borophosphosilicate glass, commonly known as BPSG, is a type of silicate glass that includes additives of both boron and phosphorus. Silicate glasses such as PSG and borophosphosilicate glass are commonly used in semiconductor device fabrication for intermetal layers, i.e., insulating layers deposited between succeedingly higher metal or conducting layers.

BPSG has been implicated in increasing a device's susceptibility to soft errors since the boron-10 isotope is good at capturing thermal neutrons from cosmic radiation.^[1]^[2] It then undergoes fission producing a gamma ray, an alpha particle, and a lithium ion. These products may then dump charge into nearby structures, causing data loss (bit flipping, or single event upset).

In critical designs, depleted boron consisting almost entirely of boron-11 is used to avoid this effect as a radiation hardening measure. Boron-11 is a by-product of the nuclear industry.

References

Glass science topics
Basics	Glass Glass transition Supercooling
Formulation	AgInSbTe Bioglass Borophosphosilicate glass Borosilicate glass Ceramic glaze Chalcogenide glass Cobalt glass Cranberry glass Crown glass Flint glass Fluorosilicate glass Fused quartz GeSbTe Gold ruby glass Lead glass Milk glass Phosphosilicate glass Photochromic lens glass Silicate glass Soda-lime glass Sodium hexametaphosphate Soluble glass Tellurite glass Thoriated glass Ultra low expansion glass Uranium glass Vitreous enamel Wood's glass ZBLAN
Glass-ceramics	Bioactive glass CorningWare Glass-ceramic-to-metal seals Macor Zerodur
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Optics	Achromat Dispersion Gradient-index optics Hydrogen darkening Optical amplifier Optical fiber Optical lens design Photochromic lens Photosensitive glass Refraction Transparent materials
Surface modification	Anti-reflective coating Chemically strengthened glass Corrosion Dealkalization DNA microarray Hydrogen darkening Insulated glazing Porous glass Self-cleaning glass Sol-gel technique Toughened glass
Diverse topics	Glass-coated wire Safety glass Glass databases Glass electrode Glass fiber reinforced concrete Glass ionomer cement Glass microspheres Glass-reinforced plastic Glass-to-metal seal Porous glass Prince Rupert's Drops Radioactive waste vitrification Windshield Glass fiber

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