Trichlorofluorosilane
 | |
| Names | |
|---|---|
| Systematic IUPAC name
Trichloro(fluoro)silane | |
| Other names
Silicon trichloride fluoride | |
| Identifiers | |
| 14965-52-7 | |
| ChemSpider | 123347 |
| PubChem | 139862 |
| Properties | |
| SiCl3F | |
| Molar mass | 153.43 g/mol |
| Density | 1.477g/cm3 |
| Except where noted otherwise, data is given for materials in their standard state (at 25 °C (77 °F), 100 kPa) | |
| Infobox references | |
Trichlorofluorosilane (Silicon trichloride fluoride) is an inorganic compound. It is used to produce silicon for use in the manufacturing of semiconductor and fiber optic materials.[1]
References
- ↑ "Preparation of mixed-halogen halo-silanes, US 7030260 B2". Retrieved 11 October 2013.