Policide (engineering)

This article is about a chemical engineering term. For a political science term, see Policide. For other uses, see Policide (disambiguation).

Policide (also spelled polyside) in engineering refers to a combination of a silicide and polysilicon.

In chemical engineering, "policide" or "polyside" is used to describe a combination of polysilicon and a silicide.[1]

References

  1. ↑ Yckache, K; P. Boivina, F. Baigeta, C. Kristukatb, G. Aurielb, B. Sagnesb, J. Oualidb and A. Glachant (April 1999). "Influence of polycide deposition on the reliability of wet and nitrided oxides". Journal of Non-Crystalline Solids 245 (1–3): 97–103. doi:10.1016/S0022-3093(98)00854-0. , abstract viewed 10-24-2006