Multilayer soft lithography

Multilayer soft lithography (MSL) is a fabrication process in which microscopic chambers, channels, valves and vias are molded within bonded layers of elastomer.

See also

• Soft lithography

Nanolithography Techniques Soft Nanoimprint Scanning probe Local oxidation Dip-Pen Electron beam Extreme ultraviolet X-ray Magnetolithography See also Nanotechnology Photolithography Nanoelectronics