ISO 14644-8
ISO 14644-8, Cleanrooms and associate controlled environments — Part 8: Classification of airborne molecular contamination became a Standard in 2006. This document was developed by the Secretariat of ISO Technical Committee 209, Institute of Environmental Sciences and Technology (IEST).[1]
This part of ISO 14644 covers the classification of airborne molecular contamination (AMC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.[1]
See also
- ISO 14644 — standard for Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones
References
- ↑ 1.0 1.1 "ISO 14644-8 Scope". IEST. 2007-12-03. Retrieved 2008-01-17.