Octadecyltrichlorosilane

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Octadecyltrichlorosilane
Identifiers
Abbreviations ODTS
CAS number 112-04-9 YesY

EC number 203-930-7
Jmol-3D images Image 1
Properties
Molecular formula C18H37Cl3Si
Molar mass 387.93 g mol−1
Appearance Colorless liquid
Density 0.984 g/mL, liquid
Boiling point 223 °C; 433 °F; 496 K (at 10 Torr)
Solubility soluble in ether, THF, THP, hydrocarbons, tetrachloroethylene[1]
Hazards
EU classification Corrosive (C)
S-phrases S26 S27 S36 S37 S39
Main hazards flammable, corrosive
NFPA 704
2
3
2
Related compounds
Related Chlorosilanes Dodecyltrichlorosilane
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Except where noted otherwise, data are given for materials in their standard state (at 25 °C (77 °F), 100 kPa)
Infobox references

Octadecyltrichlorosilane (ODTS, or n-octadecyltrichlorosilane) is an organometallic chemical. It is used in semiconductor industry to form self-assembled monolayer thin films on silicon dioxide substrates. Its structural chemical formula is CH3(CH2)17SiCl3. It is flammable, reacts with water, and is also sensitive to air. It is corrosive and can severely damage mucous membranes. Its EINECS number is 203-930-7.

Octadecyltrichlorosilane is an amphiphilic molecule consisting of a long-chain alkyl group (C18H37) and a polar head group (SiCl3), which forms Self assembled monolayers (SAMs) on various oxidic substrates.[2]

ODTS finds its use in molecular electronics, as thin insulating gates in Metal-Insulator-Semiconductor Field-Effect Transistors.[3]

Dodecyltrichlorosilane, an ODTS analog with shorter alkyl chain, is used for the same purpose as well.

ODTS-PVP films are used in organic-substrate LCD displays.[4]

References

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