Fluorosilicate glass

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Fluorosilicate glass (FSG) is a low-k dielectric used in between copper metal layers during silicon integrated circuit fabrication process. It has a low dielectric constant (k) and is now widely adopted by semiconductor foundries on geometries sub 0.25μ. Fluorosilicate glass is effectively a fluorine-containing silicon dioxide (k=3.5, while k of undoped silicon dioxide is 3.9).^[1]

Fluorosilicate glass is used by IBM.^[2] Intel started using Cu metal layers and FSG on its 1.2 GHz Pentium processor at 130 nm CMOS. TSMC (Taiwan Semiconductor Manufacturing Company) brought in FSG and copper together in the Altera APEX.

Fluorosilicate glass-ceramics have good mechanical properties. Potassium fluorrichterite based materials are composed from tiny interlocked rod-shaped amphibole crystals; they have good resistance to chemicals and can be used in microwave ovens. Richterite glass-ceramics are used for high-performance tableware.

Fluorosilicate glass-ceramics with sheet structure, derived from mica, are strong and machinable. They find a number of uses and can be used in high vacuum and as dielectrics and precision ceramic components. A number of mica and mica-fluoroapatite glass-ceramics were studied as biomaterials.^[3]

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v t e Glass science topics

Basics	Glass Glass transition Supercooling

Glass formulation	AgInSbTe Bioglass Borophosphosilicate glass Borosilicate glass Ceramic glaze Chalcogenide glass Cobalt glass Cranberry glass Crown glass Flint glass Fluorosilicate glass Fused quartz GeSbTe Gold ruby glass Lead glass Milk glass Phosphosilicate glass Photochromic lens glass Silicate glass Soda-lime glass Sodium hexametaphosphate Soluble glass Tellurite glass Ultra low expansion glass Uranium glass Vitreous enamel Wood's glass ZBLAN

Glass-ceramics	Bioactive glass CorningWare Glass-ceramic-to-metal seals Macor Zerodur

Glass preparation	Annealing Chemical vapor deposition Glass batch calculation Glass forming Glass melting Glass modeling Ion implantation Liquidus temperature Sol-gel technique Viscosity Vitrification

Optics	Achromat Dispersion Gradient-index optics Hydrogen darkening Optical amplifier Optical fiber Optical lens design Photochromic lens Photosensitive glass Refraction Transparent materials

Surface modification	Anti-reflective coating Chemically strengthened glass Corrosion Dealkalization DNA microarray Hydrogen darkening Insulated glazing Porous glass Self-cleaning glass Sol-gel technique Toughened glass

Diverse topics	Glass-coated wire Glass databases Glass electrode Glass fiber reinforced concrete Glass ionomer cement Glass microspheres Glass-reinforced plastic Glass science institutes Glass-to-metal seal Porous glass Prince Rupert's Drops Radioactive waste vitrification Windshield

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Fluorosilicate glass

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References