Tantalum borides are compounds of tantalum and boron most remarkable for their extreme hardness.
The Vickers hardness of TaB and TaB2 films and crystals is ~30 GPa[1][2][3]. Those materials are stable to oxidation below 700° C and to acid corrosion [1][3].
TaB2 has the same hexagonal structure as most diborides (AlB2, MgB2, etc.)[4]. The mentioned borides have the following space groups: TaB (orthorhombic, Thallium(I) iodide-type, Cmcm), Ta5B6 (Cmmm), Ta3B4 (Immm), TaB2 (hexagonal, aluminum diboride-type, P6/mmm) [3].
Single crystals of TaB, Ta5B6, Ta3B4 or TaB2 (about 1 cm diameter, 6 cm length) can be produced by the floating zone method [2][3].
Tantalum boride films can be deposited from a gas mixture of TaCl5-BCl3-H2-Ar in the temperature range 540–800°C. TaB2 (single-phase) is deposited at a source gas flow ratio (BCl3/TaCl5) of six and a temperature above 600°C. TaB (single-phase) is deposited at BCl3/TaCl5 = 2–4 and T = 600–700°C [1].
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