Hexafluoroacetylacetone | |
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1,1,1,5,5,5-Hexafluoro-2,4-pentanedione |
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Other names
Hexafluoroacetylacetone, HfacH |
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Identifiers | |
CAS number | 1522-22-1 |
PubChem | 24874462 |
ChemSpider | 21106446 |
Jmol-3D images | Image 1 |
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Properties | |
Molecular formula | C5H2F6O2 |
Molar mass | 208.06 g/mol |
Appearance | colourless liquid |
Density | 1.47 g/mL |
Boiling point |
70–71 °C |
Solubility in water | organic solvents |
Hazards | |
Main hazards | toxic |
(verify) (what is: / ?) Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa) |
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Infobox references |
Hexafluoroacetylacetone is the chemical compound with the formula CF3C(O)CH2C(O)CF3 (often abbreviated as hfac). This colourless liquid is a ligand precursor and a reagent used in MOCVD. Complexes of the conjugate base, often called Hfac-, exhibit enhanced volatility and Lewis acidity relative to analogous complexes derived from acetylacetone.
This organofluorine compound was first prepared by the condensation of ethyl ester of trifluoroacetic acid and 1,1,1-trifluoroacetone.[1] It has been investigated as an etchant for copper and its complexes, such as Cu(Hfac)(trimethylvinylsilane) have been employed as precursors in microelectronics.[2]