Image:US Patent 7126698 B2.jpg

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US Patent issued to de Groot and owned by the Zygo Corporation.

In the figure, 110 is the light source, 164 the detector. The beamsplitter 120 produces the two arms of the interferometer. The measurement arm 140 contains an objective lens 141 for imaging the surface to be studied 152. The reference arm 130 contains complementary optics to compensate for aberrations produced in the measurement arm.

may or may not be in the public domain In general, the contents of United States patents are in the public domain.[1]

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current20:30, 18 September 2007460×588 (36 KB)Ckott72 (Talk | contribs) (US Patent issued to de Groot and owned by the Zygo Corporation.)

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