Policide (engineering)
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- This article is about a chemical engineering term. For a political science term, see Policide. For other uses, see Policide (disambiguation).
Policide (also spelled polyside) in engineering refers to a combination of a silicide and polysilicon.
In chemical engineering, "policide" or "polyside" is used to describe a combination of polysilicon and a silicide.[1]
[edit] References
- ^ Yckache, K; P. Boivina, F. Baigeta, C. Kristukatb, G. Aurielb, B. Sagnesb, J. Oualidb and A. Glachant (April, 1999). "Influence of polycide deposition on the reliability of wet and nitrided oxides". Journal of Non-Crystalline Solids 245 (1-3): 97–103. doi:., abstract viewed 10-24-2006
