Octadecyltrichlorosilane

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Octadecyltrichlorosilane
IUPAC name n-Octadecyltrichlorosilane
Other names Trichlorooctadecylsilane
Stearyltrichrlorosilane
Identifiers
Abbreviations OTS
CAS number [112-04-9]
EINECS number 203-930-7
SMILES CCCCCCCCCCCCCCCCCCSi(Cl)(Cl)Cl
Properties
Molecular formula C18H37Cl3Si
Molar mass 387.94 g/mol
Appearance Colorless liquid
Density 0.984 g/mL, liquid
Boiling point

223 °C (496 K) (at 10 Torr)

Hazards
EU classification Corrosive (C)
NFPA 704
2
3
2
 
S-phrases S26, S27, S36, S37, S39
Related compounds
Related Chlorosilanes Dodecyltrichlorosilane
Except where noted otherwise, data are given for
materials in their standard state
(at 25 °C, 100 kPa)

Infobox disclaimer and references

Octadecyltrichlorosilane (OTS, or n-octadecyltrichlorosilane) is an organometallic chemical. It is used in semiconductor industry to form self-assembled monolayer thin films on silicon dioxide substrates. Its structural chemical formula is CH3(CH2)17SiCl3. It is flammable, reacts violently with water, and is sensitive to air. It is corrosive and can severely damage mucous membranes. Its EINECS number is 203-930-7.

Octadecyltrichlorosilane is an amphiphilic molecule consisting of a long-chain alkyl group (C18H37–) and a polar head group (SiCl3–), which forms Self-Assembled Monolayers (SAMs) on various oxidic substrates. [1]

OTS finds its use in molecular electronics, as thin insulating gates in Metal-Insulator Semiconductors.[2]

Dodecyltrichlorosilane, an OTS analog with shorter alkyl chain, is used for the same purpose as well.

OTS-PVP films are used in organic-substrate LCD displays.[3]

[edit] References