Nitrogen trifluoride

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Nitrogen trifluoride
IUPAC name	Nitrogen trifluoride
Other names	Nitrogen fluoride Trifluoramine Trifluorammonia
Identifiers
CAS number	[7783-54-2]
Properties
Molecular formula	NF3
Molar mass	71.0019 g/mol
Appearance	colorless gas
Density	3.003 kg/m3 (1.013 bar and 15 °C) gas 1540 kg/m3 (1.013 bar at boiling point) liquid
Melting point	−206.8 °C (66.35 K)
Boiling point	−129.1 °C (144.05 K) (1.013 bar)
Solubility in water	0.021 vol/vol (20 °C and 1 bar)
Structure
Molecular shape	trigonal pyramidal
Dipole moment	0.234D
Hazards
MSDS	[1] Dead link May 2007
EU classification	not listed
NFPA 704	0 2 0
Flash point	non-flammable
Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa) Infobox disclaimer and references

Nitrogen trifluoride, NF₃, a binary compound of nitrogen and fluorine, is a colorless, toxic, nonflammable, corrosive gas shipped in cylinders at high pressure. It has a characteristic moldy odor. It is a pulmonary irritant with toxicity comparable with nitrogen oxides. It may damage liver and kidneys. It is slightly soluble in water without undergoing chemical reaction.

Contents 1 Use 2 History 3 References 4 External links

[edit] Use

Nitrogen trifluoride is used in the plasma and thermal cleaning of CVD reactors. It is also used as a source of fluorine radicals for plasma etching of eg. polysilicon, silicon nitride, tungsten silicide, and tungsten, in which application it can replace perfluorocarbons (eg. hexafluoroethane) and sulfur hexafluoride, resulting in both ecological advantage and higher process efficiency. It is compatible with the metals steel and Monel(TM), and several plastics. It is a potent oxidizer, used to oxidize some high-energy fuels, preparation of tetrafluorohydrazine, and to fluorinate fluorocarbon olefins.

Nitrogen trifluoride is also used as a fuel for hydrogen fluoride and deuterium fluoride lasers, types of chemical lasers. it is very neutral compound.

[edit] History

Otto Ruff started his first unsuccessful experiments to synthesize nitrogen trifluoride in 1903. Unlike many other fluorinated compounds, nitrogen trifluoride cannot be formed simply by mixing nitrogen and fluorine gases together, and so is more challenging to produce. After 25 years he retried the synthesis and generated the nitrogen trifluoride, which was far less reactive and non explosive than nitrogen trichloride, by the electrolysis of a molten mixture of ammonium fluoride and hydrogen fluoride.^[1]

[edit] References

[edit] External links

• National Pollutant Inventory - Fluoride and compounds fact sheet