Image:Multiple patterning layout.JPG

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[edit] Summary

Layout with color-assigned features for triple patterning. The first pattern is red, the second pattern is lavender, the third pattern is orange. Due to the tight pitch and distance between features, the layout can only be formed as a composite of the three separate patterns.

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	Date/Time	Dimensions	User	Comment
current	11:37, 10 April 2008	512×384 (14 KB)	Guiding light (Talk \| contribs)	(Layout with color-assigned features for triple patterning. The first pattern is red, the second pattern is lavender, the third pattern is orange. Due to the tight pitch and distance between features, the layout can only be formed as a composite of the thr)