Template:Microtechnology

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v • d • e Microtechnology MEMS · MST · Micromachinery Basic structures Interdigital transducer · Cantilever · Microchannel Applications Sensors Microbolometer Actuators Comb drive · Scratch Drive Actuator · Thermal actuator Switches Digital micromirror device · Optical switch Other IBM Millipede · RF-MEMS · MOEMS · Bio-MEMS · Microfluidics · Micropower Processes General Surface micromachining · Bulk micromachining · HAR micromachining · Deposition · Lithography · Etching · Bonding Specific LOCOS · STI · LIGA · HexSil · SIMPLE · SCREAM · Lift-off · SOI · Smart Cut