Category:Microtechnology

From Wikipedia, the free encyclopedia

Microtechnology is a set of processes, techniques and tools used to create structures having at least one dimension of a functional feature in order of micrometer (one millionth of a metre, or 10-6 metre, or 1μm), typically within the range of 10^-4 to 10^-7 meters and application of those structures in more complex systems.

Main article: Microtechnology

v • d • e Microtechnology MEMS · MST · Micromachinery Basic structures Interdigital transducer · Cantilever · Microchannel Applications Sensors Microbolometer Actuators Comb drive · Scratch Drive Actuator · Thermal actuator Switches Digital micromirror device · Optical switch Other IBM Millipede · RF-MEMS · MOEMS · Bio-MEMS · Microfluidics · Micropower Processes General Surface micromachining · Bulk micromachining · HAR micromachining · Deposition · Lithography · Etching · Bonding Specific LOCOS · STI · LIGA · HexSil · SIMPLE · SCREAM · Lift-off · SOI · Smart Cut