ISO 14644-9
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ISO 14644-9, Cleanrooms and associate controlled environments - Part 9: Classification of surface particle cleanliness, is currently a Committee Draft and is not yet available as a Standard. [1]
This ISO document describes the classification of the particle contamination levels on solid surfaces in cleanrooms and associated controlled environments applications. Recommendations on testing and measuring methods as well as information about surface characteristics are given in informative annexes.[1]