Tungsten nitride

From Wikipedia, the free encyclopedia

Tungsten nitride (WN2) is an inorganic compound, a nitride of tungsten. It is a ceramic material. It is electrically conductive. It is a very hard solid material. It has brown color. It decomposes in water.

It is used in microelectronics as a contact material, for conductive layers, and barrier layers between silicon and other metals, eg. tungsten or copper. It is less commonly used than titanium nitride or tungsten films.

Tungsten nitride forms together with tungsten dioxide, trioxide, and pentoxide when a light bulb breaks while the filament is heated. [1]

Tungsten silicide is another material with similar use.