Talk:Stepper
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I wrote this article, and all and all I think it's a good start. Here are some needed improvements:
- Diagram showing the major subassemblies of the stepper and their relative positions with respect to the light path.
- Explanation of the types of light used, such as mercury lamps and excimer laser--Done
- Detailed sub-section under the "Major subassemblies" section for each subassembly
- Free license picture of a stepper
- Free license picture of a wafer showing grid pattern
- Microscope picture of circuit patterns and lines
- Notice that steppers may soon be superseded by other machines as design node goes below 45 nm--Done
- Discription of various techniques for finer resolution such as higher lens NA, manipulating the illumination light through various aperatures, phase-shift reticles, and others.--Started, not complete yet.
This list is just a beginning. Everyguy 18:43, 18 August 2005 (UTC), updated: --Everyguy 19:09, 15 March 2007 (UTC)
I edited the first couple of paragraphs of the article, but it wasn't logged in, so it came out with my ip address rather than my user name. That is okay, because I left some spelling errors I had to go back and correct. This article still needs illustrations and more details.
Everyguy 06:38, 26 April 2006 (UTC)
[edit] Article naming
I propose to move this article to Projection lithography, and rewrite the introduction accordingly. --Smack (talk) 05:03, 14 February 2007 (UTC)
- I'm not sure that's a good idea. I think this article is about the machine, not the technology, although there is naturally overlap between the two. I would propose instead that an article on projection lithography be written that covers the more general topic, with links to this page in the appropriate section. --Everyguy 20:26, 2 March 2007 (UTC)
