Profilometer

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A profilometer is developed a laboratory measuring instrument that uses a diamond stylus to measure a feature's length or depth, usually in the micrometre or nanometre level.

A diamond stylus is moved vertically in contact with a sample and then moved laterally across the sample for a specified distance and specified contact force. A profilometer can measure small surface variations in vertical stylus displacement as a function of position. A typical profilometer can measure small vertical features ranging in height from 10 to 65,000 nanometres. The height position of the diamond stylus generates an analog signal which is converted into a digital signal stored, analyzed and displayed. The radius of diamond stylus ranges from 5 micrometers to about 25 micrometers, and the horizontal resolution is controlled by the scan speed and scan length. There is a horizontal broading factor which is a function of stylus radius and of step height. This broading factor is added to the horizontal dimensions of the steps. The stylus tracking force is factory-set to 50 milligrams.

An optical profilometer is a non-contact method for providing much of the same information as a stylus based profilometer. Although no information is obtained about mechanical properties, the major advantage is that a three dimensional profile can be created.