Plasma processing
From Wikipedia, the free encyclopedia
Plasma processing is a plasma-based material processing technology that aims at modifying the chemical and physical properties of a surface.
Plasma processing techniques include:
- Plasma activation
- Plasma modification
- Plasma functionalization
- Plasma polymerization
- Plasma Surface Interactions
Related topics are plasma chemistry, chemical vapor deposition, and physical vapor deposition processes like sputter deposition, plasma ion doping, vacuum plasmaspraying, and reactive ion etching.
