Nitrogen trifluoride
From Wikipedia, the free encyclopedia
| Nitrogen trifluoride | |
|---|---|
  |
|
| General | |
| Systematic name | Nitrogen trifluoride |
| Other names | Nitrogen fluoride Trifluoramine Trifluorammonia |
| Molecular formula | NF3 |
| Molar mass | 71.0019 g/mol |
| Appearance | colorless gas |
| CAS number | [7783-54-2] |
| Properties | |
| Density and phase | 3.003 kg/m3 (1.013 bar and 15 °C) gas 1540 kg/m3 (1.013 bar at boiling point) liquid |
| Solubility in water | 0.021 vol/vol (20 °C and 1 bar) |
| Melting point | −206.8 °C (66.35 K) |
| Boiling point | −129.1 °C (144.05 K) (1.013 bar) |
| Basicity (pKb) | ? |
| Structure | |
| Molecular shape | pyramidal |
| Dipole moment | 0.234D |
| Bond angle | 102.3° |
| Hazards | |
| MSDS | External MSDS |
| EU classification | not listed |
| NFPA 704 |
0
2
0
OX
|
| Flash point | non-flammable |
| Toxicity | 10 ppm |
| Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa) Infobox disclaimer and references |
|
Nitrogen trifluoride, NF3, a binary compound of nitrogen and fluorine, is a colorless, toxic, nonflammable, corrosive gas shipped in cylinders at high pressure. It has a characteristic moldy odor. It is a pulmonary irritant with toxicity comparable with nitrogen oxides. It may damage liver and kidneys. It is slightly soluble in water without undergoing chemical reaction.
Nitrogen trifluoride is used in the plasma and thermal cleaning of CVD reactors. It is also used as a source of fluorine radicals for plasma etching of eg. polysilicon, silicon nitride, tungsten silicide, and tungsten, in which application it can replace perfluorocarbons (eg. hexafluoroethane) and sulfur hexafluoride, resulting in both ecological advantage and higher process efficiency. It is compatible with the metals steel and Monel(TM), and several plastics. It is a potent oxidizer, used to oxidize some high-energy fuels, preparation of tetrafluorohydrazine, and to fluorinate fluorocarbon olefins.
Nitrogen trifluoride is also used as a fuel for hydrogen fluoride and deuterium fluoride lasers, types of chemical lasers.
[edit] External links
 |
This inorganic compound-related article is a stub. You can help Wikipedia by expanding it. |
