Mask set
From Wikipedia, the free encyclopedia
A mask set is a series of electronic data that define geometry for the photolithography steps of semiconductor fabrication. Each of the physical masks generated from this data are called a photomask.
A mask set for a modern process typically contains as many as twenty or more masks, each of which defines a specific photolithographic step in the semiconductor fabrication process. Examples of masks include:
- p-well
- n-well
- active
- poly
- p-select
- n-select
- contact
- metal1, 2, 3...
For more information, see photolithography and semiconductor manufacturing.
