Ion pump (physics)
From Wikipedia, the free encyclopedia
An ion getter pump is a vacuum pump that works by ionizing the residual gases in vacuum so that they can be adsorbed to special material on the walls of the pump, a process known as gettering. Thus, it is very different from a rotary pump or a turbomolecular pump because it does not have any moving parts. Ion pumps can operate in the range of 10−3 to 10−12 torr.
An ion getter pump acts similarly to a cold cathode ion gauge, allowing the residual gas pressure to be measured by determining the current through the pump.
[edit] Sources
- Hablanian, Marsbed. Gettering and Ion Pumping. High-Vacuum Technology: A Practical Guide (ISBN 082478197X).
- Sputter Ion Pumps. Paul Scherrer Institute.
