EOT
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EOT is a abrevation for:
(1) End-of-transmission character
(2) equivalent oxide thickness.
EOT is a number used to compare performance of high-k dielectric MOS gates with performance of SiO2 based MOS gates; shows thickness of SiO2 gate oxide needed to obtain the same gate capacitance as the one obtained with thicker than SiO2 dielectric featuring higher dielectric constant k; e.g. EOT of 1 nm would result from the use a 10 nm thick dielectric featuring k=39 (k of SiO2 is 3.9)
Source: http://www.semiconductorglossary.com/
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