Current integrator
From Wikipedia, the free encyclopedia
A current integrator is an electronic device performing a time integration of an electrical current, thus measuring a total electric charge.
Current integration is used in ion beam deposition, where the meassured charge directly corresponds to the number of ions deposited on a substrate, assuming the charge state of the ions is known. The two leads of through which the current to be integrated flows have to be connected to the ion source and the substrate, closing the electric circuit which in part is given by the ion beam.
