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[edit] Summary

Example of "High Energy Resolution XPS Spectrum" also called High Res spectrum. This is used to decide what chemical states exist for the element being analyzed. In this example the Si (2p) signal reveals pure Silicon at 99.69 eV, a Si2O3 species at 102.72 eV and a small SiO2 peak at 103.67 eV. The amount of Si2O at 100.64 eV is very small.

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