Image:Autarget mod.jpg

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Autarget_mod.jpg (49KB, MIME type: image/jpeg)

A photo of a gold sputter target showing the three principal parts: the cathode which is made of the material to be deposited; the anode that serves as a counterelectrode for the sputtering process and which is typically made of steel; and the protection ring, which prevents the surrounding hearth from being sputtered. The pictured target is in a ring geometry that is used with precious metals. A disk geometry is more common for less expensive materials.

[edit] Credit

Photo taken by Alison Chaiken at HP Labs using a Nikon 995 camera. Improved using xfig.

[edit] Licensing

GFDL

Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts.
Subject to disclaimers.

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